Horizontal tube furnaces
Specialty gas-phase processes
Horizontal tube furnaces
A bank of Expertech horizontal quartz-tube furnaces supporting batch processing of multiple wafers across a wide range of configurations: wet and dry oxidation, LPCVD silicon nitride, LPCVD low-temperature oxide (LTO), LPCVD polysilicon/amorphous silicon, LPCVD TEOS, gate oxidation, general oxidation, and general and high-temperature annealing.
Rapid thermal annealing
Specialty gas-phase processes
Horizontal tube furnaces
Jipelec rapid thermal annealer (RTA) for fast, single-wafer thermal treatment with tight thermal budgets, alongside a Blue M furnace for traditional annealing processes.
Specialty gas-phase processes
Specialty gas-phase processes
Specialty gas-phase processes
Dedicated H2S CVD furnace, and nitric oxide annealing for specialized surface and interface treatment.