Scanning electron microscopy (SEM)
Scanning electron microscopy (SEM)
Scanning electron microscopy (SEM)
Thermo Scientific Apreo FE-SEM and Hitachi S-4800 FE-SEM for high-resolution critical dimension (CD) measurement, pattern inspection, and nanoscale imaging. Jeol JCM-5000 Neoscope for routine inspection and quick-turn SEM review.
Film thickness
Scanning electron microscopy (SEM)
Scanning electron microscopy (SEM)
Filmetrics F10-RT, F40-UV, and F54 thin-film measurement systems for rapid, non-contact film thickness measurement. Cleanroom ellipsometer for in-line dielectric and resist thickness monitoring.
Profilometry
Scanning electron microscopy (SEM)
Atomic force microscopy (AFM)
Contact stylus profilometry (KLA-Tencor Alpha-Step IQ, P-7, P-10, P-17) for step height, roughness, and waviness. Bruker 3D optical profilometer (white-light interferometry) and Keyence VK-X3000 laser profilometer for non-contact 3D surface topography.
Atomic force microscopy (AFM)
Atomic force microscopy (AFM)
Atomic force microscopy (AFM)
Bruker Catalyst AFM, Asylum MFP-3D-BIO, Asylum Cypher, and Park NX20 for nanoscale surface topography, roughness, and phase imaging across a range of scanning probe modes.
Optical microscopy
Atomic force microscopy (AFM)
Optical microscopy
Keyence VHX-6000 and VHX-7000 digital 3D microscopes (20×–2000×) with depth composition and 3D reconstruction. Leica DCM8 confocal microscope, Leica DM8000 M, Olympus BX-60, and Nikon Eclipse L150 optical microscopes offering bright/dark field and Nomarski modes from 5× to 150×.